Super User Fees $2000 / month
Clean Room Access Charges $24.20/hr (internal user, capped at $96.80 day);
$61.60/hr (external user)
Gold Surcharge $44 + $40 / 50nm / hour
Staff Assistance Charge $171.60/hour
Internal External
4 Point Probe Manual $5.50 / hour $13.75 / hour
Anatech SP-100 Plasma System $27.50 / hour $68.75 / hour
Brewer Spinner $11.00 / hour $27.50 / hour
Carl Zeiss 1540 $82.50 / hour $206.25 / hour
Carl Zeiss 1540 Cross Beam $154.00 / hour $385.00 / hour
Clean room access $0.00/ hour $0.00 / hour
Dek-tak 3030/3ST $5.50 / hour $13.75 / hour
Dek-tak 3030/3ST (Clean Room only) $5.50 / hour $13.75 / hour
E-beam Evaporater $33.00 / hour $82.50 / hour
Electroplating/Lift Off Bench: Bay 3 $0.00 / hour $0.00 / hour
Evatec Clusterline Sputtering tool $125.00 / hour $312.50 / hour
EVG 501 Bonder $55.00 / hour $137.50 / hour
EVG 610 Mask Aligner $49.50 / hour $123.75 / hour
J.C. Nabity system $5.50 / hour $13.75 / hour
KLA-TENCOR FLX-2320 $22.00 / hour $55.00 / hour
Laurell Spinner $11.00 / hour $27.50 / hour
LC Technologies Glove Box $27.50 / hour $68.75 / hour
Micro Automation 1006 $26.40 / hour $66.00 / hour
MIE wire Bonder $22.00 / hour $55.00 / hour
Mini Brute Furnace $27.50 / hour $68.75 / hour
MRC 8667 $27.50 / hour $68.75 / hour
Nanospec Spectrophotometer $5.50 / hour $13.75 / hour
Optiphot 200 Fluorescence MicroScope $5.50 / hour $13.75 / hour
Oxford Plasma Lab System $66.00 / hour $165.00 / hour
PANalytical/Philips X’Pert Pro $22.00 / hour $55.00 / hour
Parks Scientific XE7 AFM $38.50 / hour $96.25 / hour
Perkin Elmer 2400 $27.50 / hour $68.75 / hour
Phoenix Contact angle measurement $5.50 / hour $13.75 / hour
Photo bay $0.00 / hour $0.00 / hour
Pre-diffusion Clean Bench: Bay 1 $0.00 / hour $0.00 / hour
Quintel 4000 Mask Aligner $33.00 / hour $82.50 / hour
Savannah ALD $5.50 / hour $13.75 / hour
SCS Parylene Coating $220.00 / run $550 / run
Sputter Coater $11.00 / hour $27.50 / hour
Supra 25 SEM $44.00 / hour $110.00 / hour
Thermal Evaporater $30.80 / hour $77 / hour
Tousimus Critical Point Dryer $27.50 / hour $68.75 / hour
ULVAC NLD-570 $66.00 / hour $165.00 / hour
Unaxis PlasmaTherm 790 $55.00 / hour $137.50 / hour
Veeco Microtech Ion Mill $55.00 / hour $137.50 / hour
Wet Etch Bench: Bay 2 $0.00 / hour $0.00 / hour
Woollam ESM- 300 Ellipsometer $22.00 / hour $55.00 / hour
XACTIX e1 $22.00 / hour $55.00 / hour
Zygo NuView 6000 $22.00 / hour $55.00 / hour
Zyvex Nanomanipulator $55.00 / hour $137.50 / hour

Contact Kostas Center

448 Egan Center, 360 Huntington Ave., Boston, Massachusetts 02115
Phone: 617-373-5848
Email: s.somu@northeastern.edu

Last Updated on December 21, 2021