User Fees
| Super User Fees | $2000 / month |
|---|---|
| Clean Room Access Charges | $24.20/hr (internal user, capped at $96.80 day); $61.60/hr (external user) |
| Gold Surcharge | $44 + $40 / 50nm / hour |
| Staff Assistance Charge | $171.60/hour |
| Internal | External | |
|---|---|---|
| 4 Point Probe Manual | $5.50 / hour | $13.75 / hour |
| Anatech SP-100 Plasma System | $27.50 / hour | $68.75 / hour |
| Brewer Spinner | $11.00 / hour | $27.50 / hour |
| Carl Zeiss 1540 | $82.50 / hour | $206.25 / hour |
| Carl Zeiss 1540 Cross Beam | $154.00 / hour | $385.00 / hour |
| Clean room access | $0.00/ hour | $0.00 / hour |
| Dek-tak 3030/3ST | $5.50 / hour | $13.75 / hour |
| Dek-tak 3030/3ST (Clean Room only) | $5.50 / hour | $13.75 / hour |
| E-beam Evaporater | $33.00 / hour | $82.50 / hour |
| Electroplating/Lift Off Bench: Bay 3 | $0.00 / hour | $0.00 / hour |
| Evatec Clusterline Sputtering tool | $125.00 / hour | $312.50 / hour |
| EVG 501 Bonder | $55.00 / hour | $137.50 / hour |
| EVG 610 Mask Aligner | $49.50 / hour | $123.75 / hour |
| J.C. Nabity system | $5.50 / hour | $13.75 / hour |
| KLA-TENCOR FLX-2320 | $22.00 / hour | $55.00 / hour |
| Laurell Spinner | $11.00 / hour | $27.50 / hour |
| LC Technologies Glove Box | $27.50 / hour | $68.75 / hour |
| Micro Automation 1006 | $26.40 / hour | $66.00 / hour |
| MIE wire Bonder | $22.00 / hour | $55.00 / hour |
| Mini Brute Furnace | $27.50 / hour | $68.75 / hour |
| MRC 8667 | $27.50 / hour | $68.75 / hour |
| Nanospec Spectrophotometer | $5.50 / hour | $13.75 / hour |
| Optiphot 200 Fluorescence MicroScope | $5.50 / hour | $13.75 / hour |
| Oxford Plasma Lab System | $66.00 / hour | $165.00 / hour |
| PANalytical/Philips X’Pert Pro | $22.00 / hour | $55.00 / hour |
| Parks Scientific XE7 AFM | $38.50 / hour | $96.25 / hour |
| Perkin Elmer 2400 | $27.50 / hour | $68.75 / hour |
| Phoenix Contact angle measurement | $5.50 / hour | $13.75 / hour |
| Photo bay | $0.00 / hour | $0.00 / hour |
| Pre-diffusion Clean Bench: Bay 1 | $0.00 / hour | $0.00 / hour |
| Quintel 4000 Mask Aligner | $33.00 / hour | $82.50 / hour |
| Savannah ALD | $5.50 / hour | $13.75 / hour |
| SCS Parylene Coating | $220.00 / run | $550 / run |
| Sputter Coater | $11.00 / hour | $27.50 / hour |
| Supra 25 SEM | $44.00 / hour | $110.00 / hour |
| Thermal Evaporater | $30.80 / hour | $77 / hour |
| Tousimus Critical Point Dryer | $27.50 / hour | $68.75 / hour |
| ULVAC NLD-570 | $66.00 / hour | $165.00 / hour |
| Unaxis PlasmaTherm 790 | $55.00 / hour | $137.50 / hour |
| Veeco Microtech Ion Mill | $55.00 / hour | $137.50 / hour |
| Wet Etch Bench: Bay 2 | $0.00 / hour | $0.00 / hour |
| Woollam ESM- 300 Ellipsometer | $22.00 / hour | $55.00 / hour |
| XACTIX e1 | $22.00 / hour | $55.00 / hour |
| Zygo NuView 6000 | $22.00 / hour | $55.00 / hour |
| Zyvex Nanomanipulator | $55.00 / hour | $137.50 / hour |
Contact Kostas Center
448 Egan Center, 360 Huntington Ave., Boston, Massachusetts 02115
Phone: 617-373-5848
Email: s.somu@northeastern.edu
Last Updated on January 31, 2022