Hitachi S-4800
Location: Egan 106
Status: Online
Hitachi S-4800 is a high-resolution scanning electron microscope (SEM) with cold field emission gun. The maximum resolution can reach ~1nm. It is equipped with energy-dispersive X-ray spectroscopy (EDS) system that enables sample element analysis. It also has a Nabity nanolithography e-beam pattern generation system.
Instrument Specifications
| Electron Source | Cold Field Emission Gun |
|---|---|
| Accelerating Voltage | 500V to 30kV in 100V steps |
| Resolution | 1.0 nm Accelerating Voltage 15kV, Working Distance 4 mm 2.0 nm Accelerating Voltage 1kV, Working Distance 1.5 mm |
| Magnification | High Mag Mode 100x to 800,000x Low Mag Mode 30x to 2,000x |
| Specimen Stage | X Traverse 0 to 110 mm Y Traverse 0 to 110 mm Z Traverse 1.5 to 40 mm Tilt -5° to +70° Rotation 360° |
| Specimen Size | Max. 150 mm (6″) |
| Image Mode | Secondary Electron Imaging Back Scattering Electron Imaging |
| Accessories | Energy-dispersive X-ray Spectroscopy System Nabity Nanolithography e-beam Pattern Generation System |
Last Updated on May 5, 2022